CyberOptics to Release Vibration-Monitoring Software for Wafer-Processing Equipment at Semicon Taiwan

Engineers from a maker of wireless metrology devices for wafer processing equipment, CyberOptics Semiconductor, will release their latest vibration-monitoring software at Semicon Taiwan and demonstrate how it helps fab engineers predict equipment failure and identify wafer-contamination sources to improve yield and cycle time, the company announced.

CyberOptics engineers at Semicon Taiwan will demonstrate how fab engineers identify vibration anomalies by filtering out acceptable acceleration offsets produced by regular slow-moving equipment or high-frequency noises between 1 to 200 Hz, according to Craig C. Ramsey, Ph.D., CyberOptics Semiconductor's general manager and CTO.

Ramsey said engineers are able to set low, high or band-pass filters of equipment vibration frequencies with the company's latest vibration-monitoring software. Engineers may, for instance, filter out vibrations of 20 Hz and below and monitor vibrations of 21 Hz and above.

The software gives engineers the ability to troubleshoot and conduct preventative maintenance (PM) for vibration-related contamination and downtime "more efficiently and accurately by accounting for the natural environment of each process and existing controls," Ramsey said.

"When you know the relationship between equipment and tools in a process, you can really begin to optimize for acceleration and vibration," Ramsey said. "Our team in Taiwan will walk engineers through vibration monitoring and how the data applies to the floor."

CyberOptics Semiconductor develops automated products that measure parameters in semiconductor fabrication processes and equipment.

Software Information:

http://www.cyberopticssemi.com/downloads/wafersense/avs/

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