Axcelis Receives Follow-On Order for Integra RS(TM) Dry Strip System From Global Memory Chipmaker

Axcelis Technologies, Inc. (Nasdaq:ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received a follow-on order for its Integra RS(TM) photoresist dry strip cleaning system from a major global memory manufacturer. In a head-to-head evaluation with the competition, the Integra RS demonstrated leadership in productivity, operational flexibility and advanced process capabilities. The tools will be used for high volume manufacturing of NAND and DRAM products, as well as for the development of next generation devices.

Mary Puma, chairman and CEO, commented, "We're very pleased with this win, as it demonstrates continued customer confidence in the Integra RS system and our innovative wafer cleaning technology. The system's remarkable productivity and process versatility results in significantly lower cost of ownership for our customers."

The Integra RS offers the highest manufacturing productivity on the market today for leading-edge memory and logic devices. Its unique multi-chamber design includes paired-chamber process modules that can run production recipes with the highest throughputs available. Each of the chamber pairs can operate independently, giving users the choice of running different cleaning recipes simultaneously or performing maintenance on one module while the others continue to operate. This flexibility makes the system ideal for a variety of advanced cleaning applications in a high volume manufacturing environment. The platform also includes technology required to address cleaning challenges in future technology nodes, such as those associated with advanced lithography and high-k/metal-gate adoption.

Axcelis Technologies, Inc. (Nasdaq:ACLS), headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.

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SOURCE: Axcelis Technologies, Inc.

CONTACT:  Axcelis Technologies, Inc.
Editorial/Media
Maureen Hart
978.787.4266
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Stephen Bassett
978.787.4000

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