How Pump-Induced Particles Affect Low-k CMP Defectivity

www.semiconductor.net | Sep 1, 2008

High shear flow generated by positive displacement pumps increases the distribution of oversized particles, leading to significantly increased wafer surface defectivity (scratches or roughness) during CMP, whereas less defectivity was found in slurries circulated by a magnetically levitated

http://www.semiconductor.net/article/CA6589969.html?nid=3659

New insight to demineralization

nanotechnologytoday.blogspot.com | Aug 4, 2008

<img src="http://bp0.blogger.com/_TZ4zYEBSw1I/SJdxhoRlMtI/AAAAAAAAFTo/oDvZ0aIZUSA/s320/patricia_dove_2.jpg"

http://nanotechnologytoday.blogspot.com/2008/08/new-insight-to-demineralization.html

New insight to demineralization

www.nanowerk.com | Jul 7, 2008

(Nanowerk News) From toothpaste to technology, noncrystalline or amorphous silica is an active ingredient in a myriad of products that we use in our daily lives.

http://www.nanowerk.com/news/newsid=6307.php

Nanomaterials Industrial Status and Expected Evolution

www.electronics.ca | Feb 13, 2008

Silver-based nano-additives have made a successful market entry (50% of nanoproducts) and are now widespread in white goods, clothing and food applications. Further market penetration is forecast in the coming years, though the lack of standardization, regulation and the health & safety aspects

http://www.electronics.ca/reports/nanotechnology/nanomaterials.html

Fluid Measurement Technologies

FMT’s Nonvolatile Residue Monitor is a one-of-a-kind instrument designed to measure dissolved inorganic material, including colloidal silica, at the part per trillion level. The NRM is the only on-line water monitor capable of detecting colloidal silica in high purity water systems.

http://www.fmtonline.com/

CMP Slurry Materials

Copper and barrier, ILD and PMD, tungsten, noble metals, specialty materials, AutoStop STI, advanced wafer polishing, and DCmP (130 to 45nm technology node) solutions make up our CMP materials portfolio.

http://www.airproducts.com/Electronics/cmp.htm

Nanotechnology Commercial Organizations - Directory

One of the company's delivery systems in the most advanced stages of clinical development is a novel drug delivery system for Paclitaxel. Because of the better safety and pharmacokinetic profile, the polymeric nanoparticle delivery system is seen as a potential super generic.

http://www.nanowerk.com/nanotechnology/nanomaterial/commercial_alist.php?letter=D

Ultrapure Water

General Filter Requirements Achieving and maintaining ultrapure water (UPW) is extremely important in light of its widespread presence throughout the manufacture of semiconductor integrated circuits.

http://www.pall.com/microe_25961.asp