ASML® 5500/200®
Web Sites
powered by 
Total : 40 View more »
ASML: Products
PAS 5500™/200 High Productivity i-Line Stepper ... ASML is the world's leading provider of lithography systems for the semiconductor industry.
ASML brings out stepper for 0.35-micron | Electronic News | Find ...
ASML said its new PAS 5500/200 stepper (EN, Antenna, July 10) will be priced at $3.99 million with shipments scheduled to begin 2Q96. "This is the first stepper to ...
Introduction to ASML PAS 5500 Wafer Alignment and Exposure
... Alignment and Exposure DEFINITIONS ASML (today) -ASM Lithography (1988) -ASM International and Royal Phillips (1984) PAS - Phillips Automatic Stepper as in ASML PAS 5500/200 ...
ASML Stepper - SMFL Wiki - Rochester Institute of Technology
Facts. The ASML stepper is a 5x stepper with environmental control. Uses 6" x 6" Quartz masks; Features on the photomask are reduced 5x down to the printed feature size.
